MPŠ MP&Scaron MP&Scaron MP&Scaron Avtorji

Jožef Stefan
Postgraduate School

Jamova 39
SI-1000 Ljubljana

Phone: +386 1 477 31 00
Fax: +386 1 477 31 10


Course Description

Plasma Nanoscience


Nanosciences and Nanotechnologies, third-level study programme


prof. dr. Uroš Cvelbar


The objective of the course is to deliver to the students the existing knowledge from plasma nanoscience and its applications.

Students will be acquainted with basic concepts of plasma nanoscience, modern processes for preparation of nanomaterials or nanostructuring of surfaces including nanofabrication processes like plasma etching for development of nanostructured patterns, direct growth of nanostructures on different interphases, depositions from vapour phase as well as other modifications enabled by plasma. The plasma-assisted processes and mechanisms that enable such surface preparations will be outlined and connected to the roles of plasma radicals.

Students will develop the ability to solve independent research and development tasks in the field of plasma-assisted nanostructuring of surfaces and nanomaterials, which includes basic concepts, proper selection of processes for preparation of surfaces and growth of nanomaterials with plasma.


The course introduces the basics of plasma nanoscience including the use of reactive plasma in processes for nanostructuring surfaces, different plasma-assisted methods and techniques for preparation of nanomaterials as well as processes which run on surfaces during plasma interaction.

The basic interactions on interphase plasma-surface which enable creation of 1D, 2D or 3D nanostructures are presented. Moreover, the role of plasma radicals in these processes is unrevealed.

New methods and processes which enable nanofabrication based on plasma-assisted processes are introduced including etching, direct growth of nanostructures on different interphases, deposition from gas phase, modifications of nanostructures with plasma radicals, doping, etc.

New technologies for nanofabrication which are based on different plasmas and systems.

Current and grand challenges on the field of plasma nanoscience are presented.

Course literature:

Selected chapters from the following books:

• K. Ostrikov, “Plasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication”, 2008, Wiley, ISBN: 978-3-527-40740-8.
• M. Sankaran, “Plasma Processing of Nanomaterials”, 2012, CRC, ISBN: 9781439866764.
• K. Ostrikov, S. Xu, “Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly”, 2007, Wiley, ISBN: 978-3-527-40633-3.

Selected papers:

• K. Ostrikov, U. Cvelbar, A. B. Murphy, “Plasma nanoscience: Setting directions, tackling grand challenges”, J. Phys.D: Appl. Phys, vol.44, art. no. 174001, 2011.

Significant publications and references:

• K. Ostrikov, U. Cvelbar, A.B. Murphy, “Plasma nanoscience: Setting directions, tackling grand challenges”, J. Phys.D: Appl. Phys, vol.44, 174001, 2011.
• G. Filipič, U. Cvelbar, “Copper oxide nanowires: a review of growth”, Nanotechnology, vol. 23, no.11, 194001, 2012.
• U. Cvelbar, Z. Chen, M.K. Sunkara, M. Mozetič, “Spontaneous growth of superstructure αFe2O3 nanowire and nanobelt arrays in reactive oxygen plasma”, Small, vo. 4, no. 10, pp. 1610-1614, 2008.
• U. Cvelbar, K. Ostrikov, “Deterministic surface growth of single-crystalline iron oxide nanostructures in nonequilibrium plasma”, Crystal Growth & Design, vol.8, no.12, pp. 4347-4349, 2008.
• U. Cvelbar, “Towards large-scale plasma-assisted synthesis of nanowires”, J. Phys. D: Appl. Phys., vol. 44, art. no. 174014, 2011.
• M. Mozetič, U. Cvelbar, “A method for the rapid synthesis of large quantities of metal oxide nanowires at low temperatures”, Advanced Materials, vol.17, pp. 2138-2142, 2005.
• I. Levchenko, K. Ostrikov, M. Keidar, U. Cvelbar, “Model of nanotube growth in plasmas and reasons for single-nanowalled structure”, J. Phys. D: Appl. Phys., vol.41, no.12, art. No. 132004, 2008.
• Z. Chen, U. Cvelbar, M. Mozetič, J. He, M.K. Sunkara, “Long-range ordering of oxygen-vacancy planes in αFe2O3 nanowires and nanobelts”, Chem. Mater., vol. 20, no.9, pp. 3224-3228, 2008.
• K. Ostrikov, I. Levchenko, U. Cvelbar, M.K. Sunkara, “From nucleation to nanowires: a single step process in reactive plasmas”, Nanoscale, vo.2, no.5, pp.728-733, 2010.
• U. Cvelbar, et al., »Sub-oxide-to-metallic, uniformly-nanoporous crystalline nanowires by plasma oxidation and electron reduction«, Chem.Comm., vol. 48, no. 90, pp. 11070-11072, 2012.
• U. Cvelbar, I. Levchenko, G. Filipič, M. Mozetič, K. Ostrikov, »Plasma control of morpho-dimensional selectivity of hematite nanostructures«, Appl. Phys. Lett. Vol. 100, no. 24, art. no. 243103., 2012.


Seminar work (50%)
Oral defense of seminar work (50%)

Students obligations:

Seminar work and oral defense of seminar work.