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Ion Beam Modification of Surfaces in the Nanoscale Domain

Author(s): Barbara Šetina Batič (Author), Monika Jenko (Supervisor)

Year: 2010

Type: Doctoral dissertation

Ion beam sputtering induces morphological as well as compositional changes on the surfaces of ion-sputtered substrates. The surface undergoes kinetic processes, which lead to different morphological details: periodic ripples, substrate-defined etch pits or protuberant structures, roughening and smoothing are some possibilities for surface evolution. The aim of my doctoral dissertation …