The miniaturization of electronic devices requires the fabrication of functional components in the form of μm-sized thick films. Some of the most promising functional materials are relaxor-ferroelectric (1-x)Pb(Mg1/3Nb2/3)O3–xPbTiO3 (PMN–100xPT), as they exhibit versatile dielectric, piezoelectric and relaxor-ferroelectric properties. However, the integration of functional ceramic thick films with non-conventional substrates such …
The stress dependence of the electrical permittivity offers a convenient way of measuring pressure. This effect is suitable for static and quasi-static stress applications, where the conventional method based on the piezoelectric effect becomes inadequate. Although the principle of applying this effect for pressure sensing has been known for almost …