Search Results (1)
Optimization of ToF-SIMS depth profiling in low-pressure H2, C2H2, CO and O2 atmosphere
Time-of-flight secondary ion mass spectrometry (ToF-SIMS) is a versatile analytical method widely used in the field of surface science and thin films. Although it gives elemental, molecular, and isotopic information, it has a very low detection limit and high lateral resolution, is fast and works with all the vacuum-compatible samples, …