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Optimization and application of MeV time-of-flight secondary ion mass spectrometry in the standard and low primary ion beam energy mode
Time-of-flight secondary ion mass spectrometry using MeV ions (MeV ToF SIMS) has been around for a few decades as a reliable, surface-sensitive method for the detection of molecular ions having masses up to 1000 Da. It provides excellent lateral resolution of a few μm for imaging of organic samples, making …