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Extension of the range of primary vacuum calibration methods with the use of nonevaporable getters
Measurement of ultrahigh vacuum (UHV) and extremely high vacuum (XHV) is important in many advanced research and technology fields such as: equipment for surface analysis, particle accelerators, simulation of interstellar space, processing of advanced semiconductors, electron tubes, FE displays, etc. For traceable calibrations of UHV and XHV gauges we need …