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Surfaces and interfaces in the growth of SrTiO3 on Si by pulsed laser deposition
SrTiO3 (STO) thin films are used as buffer layers that enable epitaxial integration of various functional oxides with silicon. When pulsed laser deposition (PLD) is used to grow STO on Si, a thin amorphous layer is formed at the STO-Si interface that limits the use of such heterostructures in certain …