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Spatial and energy distributions of sputtered atoms in thin film deposition techniques

Author(s): Nastja Mahne (Author), Miha Čekada (Supervisor), Matjaž Panjan (Co-Supervisor)

Year: 2024

Type: Doctoral dissertation

The sputtering yield, the spatial distribution of the sputtered atoms, the energy distribution and the average energy of the sputtered atoms are important for numerous deposition techniques, as they determine the microstructure and the physical properties of the thin films. Using SRIM (Stopping and Range of Ions in Matter) simulations, …

Low-temperature STM study and manipulation of single atoms and nanostructures

Author(s): Erik Zupanič (Author), Albert Prodan (Supervisor), Miha Škarabot (Co-Supervisor)

Year: 2010

Type: Doctoral dissertation

The theory behind scanning tunneling microscopy and spectroscopy is presented and the basic manipulation techniques are described. Construction details of a low-temperature scanning tunneling microscope for single atom manipulation experiments are given. Single crystal copper (111) and (211) surfaces are studied. Single atom extraction, followed by lateral manipulation procedures is …