Time-of-flight secondary ion mass spectrometry (ToF-SIMS) is a versatile analytical method widely used in the field of surface science and thin films. Although it gives elemental, molecular, and isotopic information, it has a very low detection limit and high lateral resolution, is fast and works with all the vacuum-compatible samples, …
Time-of-flight secondary ion mass spectrometry using MeV ions (MeV ToF SIMS) has been around for a few decades as a reliable, surface-sensitive method for the detection of molecular ions having masses up to 1000 Da. It provides excellent lateral resolution of a few μm for imaging of organic samples, making …